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针对衍射型微透镜阵列的激光匀束系统提出一种新的优化设计方法。利用非成像光学中的等能量映射方法,建立了基于Macro宏语言的自定义优化函数。系统采用微透镜阵列和聚光球面镜作为匀光元件,在Zemax软件的序列模式中对微透镜阵列单元的非球面面型进行自动优化,实现了照度均匀性大于90%、能量利用率为83%的6mm×6mm方形光斑的优化设计。采用TracePro光学软件对设计结果进行了仿真验证。此方法无需传统方法复杂的数学计算和器件参数的反复调整,是一种十分有效的微透镜阵列激光匀束系统的设计方法。
Aiming at the laser beam homogenization system of diffractive microlens array, a new optimization design method is proposed. By using the equal energy mapping method in non-imaging optics, a self-defined optimization function based on Macro macro language is established. The system uses micro-lens array and converging spherical mirror as the light-smoothing element, and automatically optimizes the aspherical surface shape of the micro-lens array element in the sequence mode of Zemax software to achieve an illumination uniformity of more than 90% and an energy utilization rate of 83% The optimal design of 6mm × 6mm square spot. The result of simulation was verified by TracePro optical software. This method is a very effective design method of microlens array laser beam homogenization system without complicated mathematical calculation and repeated adjustment of device parameters.