论文部分内容阅读
用Raman散射研究了对向靶反应溅射法制备的CN薄膜的键结构研究表明，在C膜中掺杂N可以抑制CN膜中sp3键的形成，提高sp2键的相对含量，改善C膜的结构效稳定性
The Raman scattering studies on the bond structure of the CN thin films prepared by targeted reactive sputtering show that the doping of N into the C films can inhibit the formation of sp3 bonds in CN films, increase the relative content of sp2 bonds and improve the C film Structural stability