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随着高新技术的迅速发展，许多研究对象已进入亚微米和纳米范畴。在对这些对象的热性能和热可靠性的研究中，亚微米尺度的热物性测量已成为关键技术之一。例如：在微电子、微电子机械系统（MEMS）领域中，已使用纳米量级厚度的材质和做出纳米尺度线宽的器件。在材料科学、生物学、医学和化学等许多领域，高空间分辨率下的热物性测量也具有重要意义。本文经过实验；初步用扫描热显微镜判定了微小区域材料热导性质的差别，并从理论上探讨了用该仪器测量微小区域热导性质的方法原理。
With the rapid development of high technology, many research subjects have entered the submicron and nano categories. Submarine-scale thermophysical properties measurement has become one of the key technologies in the study of the thermal and thermal reliability of these objects. For example: In the field of microelectronics, microelectromechanical systems (MEMS), materials of nanometer scale thickness and devices that make nanometer scale line width have been used. In many fields such as material science, biology, medicine and chemistry, the measurement of thermophysical properties at high spatial resolution is also of great significance. In this paper, experiments were carried out. The differences between the thermal conductivity properties of the micro-region materials were preliminarily determined by the scanning thermal microscope, and the principle of the method for measuring the thermal conductivity properties of the micro-regions was discussed theoretically.