【摘 要】
：
The process of graphene cleaning of a copper film by bombarding it with Ar_(13) clusters is investigated by the molecular dynamics method.The kinetic energies o
【机 构】
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Institute of Industrial Ecology,Ural Branch,Russian Academy of Sciences,
【出 处】
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Chinese Physics B
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The process of graphene cleaning of a copper film by bombarding it with Ar_(13) clusters is investigated by the molecular dynamics method.The kinetic energies of the clusters are 5,10,20,and 30 eV and the incident angles are θ= 90°,75°,60°,45°,and 0°.It is obtained that the cluster energy should be in the interval 20 eV-30 eV for effective graphene cleaning.There is no cleaning effect at vertical incidence(θ =0°) of Ar_(13) clusters.The bombardments at 45° and 90° incident angles are the most effective on a moderate and large amount of deposited copper,respectively.
The process of graphene cleaning of a copper film by bombarding it with Ar_ (13) clusters is investigated by the molecular dynamics method. Kinetic energies of the clusters are 5, 10, 20, and 30 eV and the incident angles are θ = 90 °, 75 °, 60 °, 45 °, and 0 ° .It is obtained that the cluster energy should be in the interval 20 eV-30 eV for effective graphene cleaning.There is no cleaning effect at vertical incidence (θ = 0 ° ) of Ar_ (13) clusters.The bombardments at 45 ° and 90 ° incident angles are the most effective on a moderate and large amount of deposited copper, respectively.
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