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本文研究了用无机溶胶凝胶法制备的 V2 O5 薄膜的 XRD结果及其气敏特性 .凝胶在 40 0℃下烧结 12 h后完全形成了 V2 O5 晶体 .掺 3wt% Pd+1wt% Au的 V2 O5 薄膜在较大范围内对乙醇具有较高的灵敏度 .加热电压为 5 .5 V时灵敏度达到最大值 .该气敏薄膜具有较好的选择性 ,NH3、H2 、CO、CH3COCH3等气体不干扰元件的测量 .元件的响应时间为15 s,恢复时间为 5 s.
In this paper, the XRD results and gas sensing properties of V2 O5 thin films prepared by inorganic sol-gel method were investigated.The results show that the V2 O5 thin films are completely formed after sintering at 40 0 ℃ for 12 h.The doping of 3 wt% Pd + 1 wt% Au The V2 O5 thin film has higher sensitivity to ethanol in a wide range, and the sensitivity reaches the maximum when the heating voltage is 5.5 V. This gas-sensitive thin film has better selectivity and the gas such as NH3, H2, CO and CH3COCH3 is not Interference element measurement The response time of the element is 15 s and the recovery time is 5 s.