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采用磁控溅射法在15-15Ti不锈钢上沉积AlN/SiC双层薄膜,并在800℃氩气气氛中退火120 min。用XRD、AFM和SEM表征了薄膜的结构和形貌。测试了镀膜前后15-15Ti钢在500℃持续1000 h条件下在含氧质量分数为(0.76~1.39)×10-8%的铅铋溶液中的耐腐蚀性能。结果表明:未镀膜15-15Ti钢的腐蚀层厚度约为600 nm,并且钢发生了溶解腐蚀;而镀膜后的钢未发现铅铋合金的侵蚀现象,钢的耐腐蚀能力明显提高。
AlN / SiC bilayer films were deposited on 15-15Ti stainless steel by magnetron sputtering and annealed at 800 ℃ for 120 min in argon atmosphere. The structure and morphology of the films were characterized by XRD, AFM and SEM. The corrosion resistance of 15-15Ti steel in the lead-bismuth solution with oxygen content of (0.76 ~ 1.39) × 10-8% at 500 ℃ for 1000 h before and after coating was tested. The results show that the corrosion layer thickness of uncoated 15-15Ti steel is about 600 nm, and the steel is dissolved and corroded. However, the corrosion of lead and bismuth alloy is not found after coating, and the corrosion resistance of steel is obviously improved.