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光学电压传感器是重要的电压传感仪器,因其具有独特的优势,得到了越来越广泛的应用。提出并实现了一种新型准互易反射式集成光学电压传感器,采用基于钛扩散技术制作的Y切Z传铌酸锂直波导作为电场敏感元件;采用全数字闭环负反馈检测技术和数字滤波技术处理信号,使其具有较大的动态范围和较好的线性度,同时可分离信号中的交直流信号,方便进行温补与交流电压的测量。搭建的实验光路互易性良好,在1.4~4600V的工频交流电压下,系统测量的最大非线性误差仅为0.35%,80~4600V的测量变比误差小于1%。
Optical voltage sensor is an important voltage sensing instrument, because of its unique advantages, has been more and more widely used. A new type of quasi-reciprocal reflective integrated optical voltage sensor is proposed and implemented. Y-cut Z-pass lithium niobate straight waveguide fabricated by titanium diffusion technology is used as the electric field sensitive element. The digital closed loop negative feedback detection technology and digital filtering technology Signal processing, it has a larger dynamic range and better linearity, while the signal can be separated from the AC and DC signals for easy temperature compensation and AC voltage measurement. The built-in experimental optical path has good reciprocity. Under the AC voltage of 1.4 ~ 4600V, the maximum nonlinearity error measured by the system is only 0.35%, and the error of measurement distortion of 80 ~ 4600V is less than 1%.