论文部分内容阅读
本文叙述了硼微晶玻璃片(国外简称为 Boron~(+TM),国内简称为PWB)在硅微波低噪声浅结平面型晶体管扩散工艺中的使用方法和系统的几何尺寸;并给出了温度 T 与扩散电阻 R 口的关系曲线;热处理时间与扩散层电阻的关系曲线;比较了 PWB 和 BN 箱法扩散的直流特性。
This paper describes the method and system geometry of Boron glass-ceramic wafer (Boron ~ (+ TM) Abbreviated as PWB for short) Temperature T and diffusion resistance R port curve; heat treatment time and diffusion layer resistance curve; compared PWB and BN box DC characteristics of diffusion.