用离子束溅射法制备了锆单层薄膜 .用设计新型夹具和预置种子方法 ,对薄膜中结瘤微缺陷的生长过程进行了研究 .在高分辨率光学显微镜和扫描电子显微镜下观察发现 ,结瘤在其生长初期呈现出分形的特征 .用分子动力学和薄膜生长的扩散限制聚集模型 ,薄膜中结瘤微缺陷成核时的分形现象得到了很好的解释 . Zirconium monolayer films were prepared by ion beam sputtering.The growth process of the nodulated microdefects in the films was studied by designing new jigs and presetting seeds.It was observed under high resolution optical microscope and scanning electron microscope , And nodulation has the characteristics of fractal in the early stage of its growth.Using molecular dynamics and diffusion-limited aggregation model of thin film growth, the fractal phenomenon of nodulation micro-defects in the film nucleation is well explained.