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用 EACVD法在硬质合金 ( YG6)刀具上沉积金刚石涂层 ;用氢微波等离子体刻蚀的方法对基底进行表面预处理 ,以期提高金刚石涂层的附着力和涂层刀具的切削性能 ;附着力采用压痕法计算测定 ,切削性能通过对碳化硅增强铝基复合材料的切削试验测定 ;用 X射线应力仪测试了涂层残余应力 ,并就不同预处理对性能的影响进行了分析和讨论。
The diamond coating was deposited on cemented carbide (YG6) tool by EACVD method. The surface of substrate was pretreated by hydrogen microwave plasma etching in order to improve the adhesion of diamond coating and the cutting performance of coated tool. The indentation method was used to calculate the cutting performance. The cutting performance was measured by the cutting test of silicon carbide reinforced aluminum matrix composites. The residual stress of the coating was tested by X-ray stress meter. The influence of different pretreatment on the performance was analyzed and discussed .