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本文首先介绍了压电驱动二维微动工作台定位补偿系统的结构特点，然后对微动工作台的性能进行了分析，给出了性能实测结果，最后研究了系统在超精密定位补偿方面的应用。
In this paper, the structural characteristics of the piezoelectric microdynamic table positioning and compensation system are firstly introduced. Then the performance of the micromotion working table is analyzed. The measured results are given. Finally, the performance of the system in ultra-precision positioning compensation application.