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采用射频非平衡磁控溅射技术制备了具有不同(002)择优取向程度的WS2薄膜,研究了Ar流量对薄膜成分、微观结构、力学性能和摩擦学性能的影响.研究表明:随Ar流量的增大,WS2薄膜的S/W原子比和(002)衍射峰强度均表现出先降低后升高的变化趋势,而硬度和弹性模量表现出先升高后降低的变化趋势.在大气环境下,WS2薄膜的(002)择优取向程度、S/W原子比以及硬度对薄膜的摩擦学性能均具有显著影响,当S/W原子比较低、(002)择优取向度弱、硬度较高时,薄膜脆性较大,易于发生润滑失效;当S/W原子比、(002)择优取向度和硬度均较高时,薄膜结构致密,且摩擦过程中在对偶表面易于形成有效的转移膜,薄膜表现出较好的减摩、抗黏着特性和优异的抗磨性能.
The effects of Ar flux on the composition, microstructure, mechanical properties and tribological properties of thin films were studied by using RF unbalanced magnetron sputtering technique to prepare WS2 thin films with different preferred (002) preferred orientations. The atomic ratio of S / W and the intensity of (002) diffraction peak of WS2 film both showed the trend of decreasing first and then increasing, while the hardness and elastic modulus showed the trend of first rising and then decreasing .In atmospheric environment, The preferred orientation of (002), the atomic ratio of S / W and the hardness of WS2 thin films have significant effects on the tribological properties of the films. When the S / W atomic ratio is low, the preferred orientation degree is (002) weak and the hardness is high, The brittleness is large and the lubrication failure is easy to happen. When the S / W atomic ratio, (002) preferred orientation degree and hardness are high, the film structure is compact and the effective transfer film is easily formed on the dual surface during the rubbing process. Better anti-friction, anti-adhesion properties and excellent anti-wear properties.