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本文简要介绍了纳米尺度测量概况和扫描电镜在纳米测量中的主要应用,从扫描电镜测长用标准物质,扫描电镜计量检定规程和长度测量标准方法3个方面简述了纳米尺度测量方法的标准化概况及国内外研究现状,并对纳米尺度测量未来的发展做出了展望。
This paper briefly introduces the application of nanoscale measurement and scanning electron microscopy in nanometer measurement. The standardization of nanometer scale measurement method is briefly described from three aspects of measurement standard of scanning electron microscopy, scanning electron microscope measurement protocol and length measurement standard method Overview and research status at home and abroad, and made a prospect of the future development of nanoscale measurement.