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二次电子温度计算是研究Kaufman放电室的核心内容之一。针对Kaufman放电室建立稳态平板非均匀放电模型对二次电子温度进行求解。稳态平板非均匀放电模型从扩散方程出发,重点考虑离子漂移造成的扩散运动和双极性电场对放电室径向密度梯度造成的影响,进一步结合粒子数守恒方程,给出用于求解二次电子温度的方程的解析表达式。代入典型的Kaufman放电室结构参数进行计算的结果表明,用稳态平板非均匀放电模型计算出来的二次电子温度符合实验测量的范围,同时说明在中低压放电条件下,扩散运动和双极性电场是影响放电性能的关键参数。
Secondary electron temperature calculation is to study Kaufman discharge chamber one of the core content. The steady-state plate non-uniform discharge model was established for Kaufman discharge chamber to solve the secondary electron temperature. Based on the diffusion equation, the steady-plate non-uniform discharge model is mainly concerned with the influence of diffusion motion and bipolar electric field on the radial density gradient of the discharge chamber. By combining the conservation equation of particle number, An analytical expression of the equation of electron temperature. Substituting into the typical parameters of Kaufman discharge cell, the results show that the calculated secondary electron temperature accords with the experimental measurement range with steady-state plate non-uniform discharge model, and shows that the diffusion motion and bipolarity Electric field is a key parameter affecting discharge performance.