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氧化钒薄膜在非制冷红外成象器件中的应用已成为国际上研究的热点。各种晶体结构的氧化钒性能差异很大 ,为此综述了不同氧化钒晶体的结构和性能。由于制备方法及工艺条件对薄膜性能有较大影响 ,在此介绍了二氧化钒和五氧化二钒薄膜的几种主要制备方法及对生成膜结构性能的影响
The application of vanadium oxide film in uncooled infrared imaging device has become a hot spot in the world. Various vanadium oxide properties of the crystal structure vary widely, for which the structure and properties of different vanadium oxide crystals are reviewed. As the preparation method and process conditions have a greater impact on the performance of the film, introduced several main preparation methods of vanadium dioxide and vanadium pentoxide film and the impact on the performance of the film structure