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燃料电池金属极板迫切需要提高导电性和耐腐蚀性。本文运用非平衡磁控溅射离子镀(CFUBMSIP)工艺对316L不锈钢双极板进行表面改性。以氮化钛为基础膜系,掺入铬元素制备钛铬氮膜;通过SEM、XRD和XPS等分析方法揭示铬元素掺杂对氮化钛物相和成分影响规律;最后对铬钛氮膜导电性和耐腐蚀性能开展实验研究。研究表明,当钛铬比例为3:1时所得钛铬氮膜具有最优性能。
Fuel cell metal plates urgently need to improve conductivity and corrosion resistance. In this paper, the surface modification of 316L stainless steel bipolar plate was carried out by using unbalanced magnetron sputter ion plating (CFUBMSIP). Titanium-chromium nitride films were prepared by adding titanium nitride to the base film system of titanium nitride. The influence of chromium doping on the phase and composition of titanium nitride was revealed by SEM, XRD and XPS analysis. Finally, Conductivity and corrosion resistance to carry out experimental study. The results show that when the ratio of titanium and chromium is 3: 1, the obtained titanium chromium nitride film has the best performance.