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用光的散射技术测量工件表面的粗糙度参数是近几年来发展起来的新的测量技术。它的优点是非接触、区域平均和快速测量等等,特别适合于在线测量工件表面的形貌。目前,国外正在开展从测量表面粗糙度的光的散射技术的信息中直接得到表面粗糙度参数的反计算问题的研究。为此,我们利用美国国家标准局(NationalBureau of Standards)用于测量散射光的角度分布、研究表面粗糙度的仪器通过实验研究和分析提出了用激光散射光锥法直接测量工件表面的算术平均斜率⊿_α。算术平均斜率的测量范围为0.01<⊿_α<0.20。
Measuring the roughness of workpiece surface with light scattering technique is a new measurement technique developed in recent years. Its advantages are non-contact, area averaging and rapid measurement, etc., especially suitable for on-line measurement of the topography of the workpiece surface. At present, the research on the inverse calculation of the surface roughness parameter is directly carried out from the information of the light scattering technique of measuring the surface roughness. For this purpose, we use the National Bureau of Standards (NBS) to measure the angular distribution of scattered light. The instrument for studying the surface roughness has been proposed to directly measure the arithmetic average slope of the workpiece surface by using the laser light scattering cone method through experimental research and analysis. ⊿_α. The arithmetic mean slope measurement range is 0.01 <⊿_α <0.20.