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研究了一种新型的有表面凹槽的亚波长金属光栅结构,通过改变表面凹槽填充物的折射率,可调控该结构的远场透射效率,在光学探测、生物传感等方面具有应用前景;结合金属波导理论,提出一种基于亚波长金属光栅波导结构的新型超分辨光刻方案,入射光波长为436nm时,最高刻写分辨率可达34 nm。
A new type of subwavelength metal grating with surface grooves is studied. By changing the refractive index of the surface groove filler, the far-field transmission efficiency of the structure can be controlled and has the potential application in optical detection and biosensor Based on the metal waveguide theory, a novel super-resolution lithography scheme based on a subwavelength metal grating waveguide structure is proposed. The maximum engraving resolution can reach 34 nm when the incident light wavelength is 436 nm.