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根据燃烧化学沉积法的相变动力学特点,以反应物密度的变化为相变动力学变量,建立了燃烧化学沉积法的相变动力学模型,按照完全燃烧、雾化剂不过量和雾化效果良好的原则,通过初始液体雾化研究和相变动力学实验获得了实现良好雾化效果的实验参数,制备了均匀致密的α-Al2O3纳米陶瓷薄膜,并运用SEM和TEM等分析了α-Al2O3纳米陶瓷薄膜的显微形貌和结构。
According to the phase change kinetics of the combustion chemical deposition method, the phase change kinetic model of combustion chemical deposition was established by taking the change of reactant density as the phase change kinetic variable. According to the complete combustion, good atomization agent and good atomization effect Principle, the experimental parameters of achieving good atomization effect were obtained by the initial liquid atomization and phase change kinetics experiments, the uniform and dense α-Al2O3 nano-ceramic thin films were prepared, and the α-Al2O3 nano-ceramic thin films The micro-topography and structure.