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本文简述了气相法生长金刚石薄膜的基本过程,论述了反应气体系统及碳源浓度、激活源、基片温度和预处理等参数对金刚石结构和性能的重要影响.
In this paper, the basic process of vapor grown diamond film is briefly described. The important influence of reaction gas system, carbon source concentration, activation source, substrate temperature and pretreatment on the structure and properties of diamond is discussed.