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本文主要介绍了纳米三坐标测量机的驱动系统。纳米三坐标测量机是一个十分复杂的系统,包括复杂的机械结构,精密的信号处理系统,灵敏的测头系统,精密的驱动系统以及其他的系统和模块。在本研究系统中,基于DVD读取头的新型的三维测量测头应用于三维测量以及定位。三个压电线性电机作为纳米三坐标测量机的驱动电机。机械机构的运动平台按照特殊的原理设计,可以最大化的消除阿贝误差。长度测量系统采用了激光回馈干涉仪。所提出的驱动与控制策略,可以实现长距离纳米级精度的快速精密驱动以及定位。X、Y、Z三个方向上的行程为50mm×50mm×50mm。目前,本系统可以实现对不定距离的单方向的快速稳定的逼近,并有效防止过冲。在一维内,不同位置点的定位波动可以被控制在±4nm左右。经过目前的测试,本系统适用于纳米三坐标测量机的驱动与控制任务。
This article describes the nano-CMM drive system. Nano CMM is a very complex system, including complex mechanical structure, precision signal processing system, sensitive probe system, precision drive system and other systems and modules. In this research system, a new type of 3D measuring probe based on a DVD reading head is used for three-dimensional measurement and positioning. Three piezoelectric linear motors act as the drive motor for the Nano CMM. The mechanical structure of the movement platform in accordance with a special principle designed to eliminate Abbe error. Length measurement system uses a laser feedback interferometer. The proposed driving and control strategy enables fast, precise driving and positioning of long-range nanoscale accuracy. The travel in X, Y, Z three directions is 50mm × 50mm × 50mm. At present, the system can achieve fast and stable approximation of unidirectional one-way and effectively prevent overshooting. Within one dimension, the positioning fluctuation at different positions can be controlled at ± 4nm. After the current test, the system is suitable for the drive and control tasks of nano-CMM.