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采用非平衡磁控溅射离子镀技术在M2工具钢和单晶Si表面沉积多元CrMoAlN纳米多层薄膜.利用EDS,SEM,XRD,XPS,纳米压痕仪和销盘磨损试验仪研究Mo含量对CrMoAlN薄膜成分、表面和截面形貌、相结构、化学价态、显微硬度和摩擦性能的影响.结果表明,不同Mo含量的CrMoAlN薄膜均为fcc结构,Mo代替了Cr Al N晶格中部分Cr或Al的位置,形成了以fcc-Cr N相为基础的CrMoAlN置换固溶体.随着Mo含量提高,CrMoAlN薄膜表面颗粒尺寸明显减小,截面柱状晶结构逐渐消失.CrMoAlN薄膜的显微硬度和弹性模量随着Mo含量的增加而提高,摩擦系数和磨损率随着Mo含量的提高而降低.Mo含量为19.47%(原子分数)时,显微硬度与弹性模量均达到最大值29.70 GPa和427.53 GPa,摩擦系数和磨损率达到最小值0.271和1.2×10-16m3/(N·m).
The multi-layered CrMoAlN multilayer films were deposited on the surface of M2 tool steel and single crystal Si by using unbalanced magnetron sputter ion plating technology.The Mo content was studied by EDS, SEM, XRD, XPS, nanoindentation and pin-plate wear tester CrMoAlN thin films, the structure and chemical valence, the microhardness and the tribological properties of CrMoAlN thin films were studied.The results show that all of the CrMoAlN thin films with the different Mo contents have the fcc structure and Mo replaces part of the Cr AlNN lattice Cr or Al, the CrMoAlN substitutional solid solution based on fcc-CrN phase was formed.With the increase of Mo content, the grain size of CrMoAlN thin films decreased obviously and the columnar columnar structure disappeared gradually.The microhardness of CrMoAlN thin films and The elastic modulus increases with the increase of Mo content, and the friction coefficient and the wear rate decrease with the increase of Mo content. When the Mo content is 19.47% (atomic fraction), the microhardness and elastic modulus reach the maximum value of 29.70 GPa And 427.53 GPa respectively, the friction coefficient and wear rate reached the minimum of 0.271 and 1.2 × 10-16m3 / (N · m).