本文对微机械中热胀系数不同的材料构成的双层复合薄板在均匀温升下的挠曲特性进行了研究 ,提出了在均匀温升下双层薄板热挠曲求解的能量法 ,并给出了小挠度下中心挠度与板厚的解析关系 ,为薄膜谐振式传感器温度特性的研究和新型温度传感器的设计与开发打下了基础 . In this paper, the deflection characteristics of double-layer composite thin plates made of different materials with thermal expansion coefficients in micromachined machines under uniform temperature rise are studied. The energy method for solving the heat deflection of double-layer thin plates under uniform temperature rise is proposed. Under the condition of small deflection, the center deflection and the plate thickness are analytically related, which lays the foundation for the research of the temperature characteristics of the thin film resonant sensor and the design and development of a new type of temperature sensor.