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精密磨削和超精密加工中所使用机床的主轴部件和机床导轨近年来有了很大的发展,在六十年代主要是采用液体静压轴承和静压导轨,而七十年代国外研制高精度空气静压轴承和空气静压导轨,取得了很大的进展。美国气动精密(Pneumo Precision)公司、Du Pout公司和埃克塞罗(Ex-Cell-O)公司等将高精度空气静压支承用于超精密加工的主轴部件和导轨。美国气动精密公司已经成系列地生产MSG超精密机床,包括金刚石砂轮磨削、金刚石车削、铣平面与镗孔、金刚石飞刀切削等各种机床。机床主轴和导轨全部采用空气静压
In recent years, there has been a great development of the spindle components and the machine tool guideways used in precision grinding and ultra-precision machining. In the 1960s, hydrostatic bearings and hydrostatic guideways were mainly used. In the seventies, Great progress has been made in aerostatic bearings and hydrostatic air guides. Pneumo Precision, Du Pout and Ex-Cell-O companies use high-precision aerostatic bearings for the ultra-precision machining of spindle components and rails. Pneumatic Precision America has produced series of MSG ultraprecision machine tools, including diamond grinding wheel, diamond turning, milling plane and boring, diamond flying knife cutting and other machine tools. The machine spindle and guide all adopt the static pressure of air