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本文对空气中应用扫描隧道显微镜（STM）进行的纳米级加工进行了研究。采用石墨（HOPG）和金薄膜作为样品．通过在STM探针和样品之间施加一定的电压脉冲制造出了具有纳米级尺度的结构。本文对形成的特征结构进行了分析．总结出部分实验规律．认为电场静电力作用使STM针尖或样品产生的机械变形是特征结构形成的主要原因。
In this paper, nanoscale machining using scanning tunneling microscope (STM) in the air is studied. Graphite (HOPG) and gold films were used as samples. Structures with nanoscale dimensions were created by applying a certain voltage pulse between the STM probe and the sample. In this paper, the formation of the characteristics of the structure were analyzed. Summed up some experimental rules. It is considered that the electrostatic deformation of the STM tip or the sample caused by the electrostatic field of the electric field is the main reason for the formation of the characteristic structure.