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提出了一种基于腔面非注入区的新型窗口结构,通过腐蚀高掺杂欧姆接触层,在腔面附近引入电流非注入区,限制载流子注入腔面,减少载流子在腔面处的非辐射复合,提高了激光器腔面的光学灾变性损伤(COD)阈值。同时,引入脊型波导结构,降低了光束的水平发散角。采用该结构制作的器件在功率达到22W时仍未出现COD现象,而无腔面非注入区结构的器件输出功率达到18W时腔面发生COD。同时,采用该结构制作的器件在工作电流为12A时其光束的水平发散角约为10°,而常规电流非注入区结构的器件在相同的工作电流下其光束水平发散角约为15°。
A new type of window structure based on non-implanted region is proposed. By etching the heavily doped ohmic contact layer, a current non-implanted region is introduced near the cavity surface to limit the injection of carriers into the cavity surface and reduce the number of carriers at the cavity surface The non-radiative recombination improves the optical catastrophic damage (COD) threshold of the laser cavity surface. At the same time, the introduction of ridge waveguide structure, reducing the horizontal beam divergence angle. The device fabricated with this structure still does not appear COD phenomenon when the power reaches 22W, while the COD of the cavity surface occurs when the output power of the device without cavity non-injection region reaches 18W. At the same time, the device fabricated with this structure has a beam divergence of about 10 ° at a current of 12A, whereas the device with a normal current non-implant region has a beam divergence of about 15 ° at the same operating current.