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用XRD、SEM和EDS研究了用三源分别蒸发和单溶液源超声雾化蒸发MOCVD-YBCO/Ag超导膜的显微组织和成分。两种工艺所制YBCO样品的TCO为88~91K。静态沉积YBCO/Ag膜的电流密度Jc高于动态沉积样品。其中单溶液源超声雾化MOCVD-YBCO/Ag膜的Ic和Jc最高达到358A和22×105A/cm2(77K,0T)。
The microstructure and composition of the MOCVD-YBCO / Ag superconducting film were studied by XRD, SEM and EDS respectively with three sources of evaporation and single source ultrasonic atomization. The TCO of YBCO samples made by the two processes is 88-91K. The current density Jc of the YBCO / Ag films deposited statically was higher than that of the dynamically deposited samples. Among them, the Ic and Jc of the MOCVD-YB-CO / Ag film were up to 3.58A and 22 × 105A / cm2 (77K, 0T) respectively.