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本文描述了改进型潘宁离子源在活性化学反应机理作用基础上获得难熔金属离子。研究了源结构和引束上活性气体的影响,并获得有关结果。
This paper describes the improved Penning's ion source to obtain refractory metal ions based on the active chemical reaction mechanism. The effect of the active structure on the source structure and the lead is studied and the results obtained.