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报道了用两束相干激光在HF溶液中的多孔Si(PS)表面上干涉形成光强周期分布,通过光溶解得到了孔隙率周期变化的结构,从而制备出氧化PS周期性波导光栅.实现了辐射模与波导中传输模之间的耦合,并由外部入射光波或衍射光的方向确定了波导层的有效折射率.
氧化多孔硅周期性波导光栅耦合器的实验研究
【摘 要】
：
报道了用两束相干激光在HF溶液中的多孔Si(PS)表面上干涉形成光强周期分布,通过光溶解得到了孔隙率周期变化的结构,从而制备出氧化PS周期性波导光栅.实现了辐射模与波导中传
【机 构】
：
新疆大学信息科学与工程学院
【出 处】
：
光电子·激光
【发表日期】
：
2004年期
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