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利用声发射仪对脉冲光纤激光诱导背向湿式刻蚀蓝宝石的过程进行了试验研究。在激光诱导背向湿式刻蚀蓝宝石的过程中检测到的声发射信号包含丰富的特征信息;利用声发射信号的幅度、能量计数和撞击计数等特征参数对激光诱导背向湿式刻蚀蓝宝石过程进行表征;蓝宝石未被切穿时声发射信号表现为声发射事件少,幅度大(90~100dB),能量计数较大,撞击计数较小;蓝宝石被切穿后声发射信号表现为声发射事件多,幅度小(40~80dB),能量计数基本为0,撞击计数较大。
The experimental study on the process of pulsed fiber laser-induced back-wet etching of sapphire by acoustic emission was carried out. The acoustic emission signals detected during laser-induced back-wet etching of sapphire have rich feature information. The laser-induced back-wet etching of sapphire is carried out by using the characteristic parameters of amplitude, energy count and impact count of acoustic emission signals The acoustic emission signals of sapphire were not cut, the acoustic emission events were small, with a large amplitude (90 ~ 100dB), large energy counts and small impact counts. The acoustic emission signals of Sapphire , A small range (40 ~ 80dB), the basic energy count is 0, a larger impact count.