本文利用相干高通滤波成像系统对光学元件表面疵病进行了测量 ,提出了等效疵病面积的概念及计算公式 ,由等效疵病面积可计算出与 GB1185 - 89对应的疵病等级 J。实验装置的分辨率为 10μm,并具有可靠的表面疵病等级评价 In this paper, the coherent high-pass filtering imaging system was used to measure the flaw on the surface of the optical element. The concept of the equivalent flaw area and the calculation formula were put forward. The flaw level corresponding to GB1185 - 89 was calculated from the equivalent flaw area. The experimental device has a resolution of 10 μm and has a reliable surface defect rating