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为了避免在超光滑加工过程中破坏光学元件的原有面形,同时保证整个表面粗糙度的均匀一致,研究了超光滑加工过程中的磨头控制技术。首先分析了超光滑加工机床的结构形式及超光滑加工工艺特点;然后研究了非球面母线的双圆弧拟合算法以及磨头进给速度的控制方法;最后将所研究的磨头运动控制算法应用于超光滑加工控制软件。以顶点曲率半径为300mm和口径为200mm的抛物面为例,拟合了非球面母线,分析了误差分布曲线以及磨头速度变化曲线,验证了算法的正确性。
In order to avoid the destruction of the original surface shape of the optical element during the ultra-smooth machining process and to ensure the uniformity of the entire surface roughness, the grinding head control technology in the ultra-smooth machining process was studied. Firstly, the structure of the ultra-smooth machining machine tool and the characteristics of the ultra-smooth machining are analyzed. Then the double-arc fitting algorithm of the aspheric bus bar and the control method of the grinding head feed speed are studied. Finally, the grinding head motion control algorithm Used in ultra-smooth processing control software. Taking a paraboloid with a vertex radius of curvature of 300 mm and a diameter of 200 mm as an example, the aspheric generatrix was fitted and the error distribution curve and the change curve of the grinding head speed were analyzed. The correctness of the algorithm was verified.