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选择性氧化工艺已经成为制备高性能垂直腔面发射激光器(VCSEL)的关键技术,氧化后形成的氧化层提供了良好的电限制和折射率导引,但选择性氧化速率是呈线性规律还是抛物线规律仍存在很大的争议.在多种温度条件下,做了环形沟槽和环形分布孔的氧化实验,这是在垂直腔面发射激光器中采用的两种结构.实验结果表明,氧化窗口形状对氧化速率的影响也依赖温度条件,并对这种实验现象给出了定性解释.
The selective oxidation process has become a key technology for the fabrication of high performance vertical cavity surface emitting lasers (VCSELs). The oxide layer formed after oxidation provides good electrical limiting and refractive index guidance, but does the selective oxidation rate be linear or parabolic The law is still very much controversial.Under the conditions of a variety of temperature, the ring groove and annular distribution hole oxidation experiment, which is used in the vertical cavity surface emitting lasers two structures.The experimental results show that the shape of the oxidation window The effect on the oxidation rate is also dependent on the temperature conditions and gives a qualitative explanation of this experimental phenomenon.