论文部分内容阅读
采用有限差分光束传输法(FDBPM)分析光波在大角度交叉区域的传输过程,利用pad近似解决大角度传输问题;利用透明边界条件弥补边界光波反射现象,通过追赶法编程计算有限差分方程组,得到在一定光波导结构条件下传输损耗与交叉角度之间的关系。在此基础上,利用低压化学气相沉积技术在硅衬底上制作了二氧化硅交叉波导结构,实验结果表明有限差分光束传输法在分析大角度交叉时具有比较高的计算精度。
The finite-difference beam transmission method (FDBPM) is used to analyze the transmission of light waves in the large-angle crossing region. The problem of large-angle transmission is solved by using pad approximation. By using transparent boundary conditions to make up for the reflection of boundary light waves, The relationship between the transmission loss and the crossing angle under a certain optical waveguide structure is obtained. On this basis, a cross-waveguide structure of silicon dioxide is fabricated on a silicon substrate by using a low-pressure chemical vapor deposition technique. The experimental results show that the finite difference beam transmission method has relatively high calculation accuracy when analyzing large-angle crossings.