在集成电路工业已经进入超大规模集成电路时代的今天,如何使超纯水这一重要基础材料的纯度达到电子级Ⅰ级水准,已成为我国净化技术中超纯水处理领域一个急待解决的技术问题。本文专题介绍英国ELGA公司全自动超纯水处理系统工艺流程和设备的特点,最后介绍了该系统生产的超纯水所达到的质量指标。 Nowadays, when the integrated circuit industry has entered the era of VLSI, how to make the purity of ultrapure water, an important basic material, reach the level of electronic grade I has become an urgent technical problem in the field of ultrapure water treatment in our country’s purification technology . This article features the British ELGA automatic ultrapure water treatment system processes and equipment characteristics, and finally introduced the system produced by the ultra-pure water to achieve the quality indicators.