为改善高功率固体激光器的散热性能,以R600a为冷却工质,将制冷系统和喷雾冷却系统相结合,设计了一体化制冷喷雾冷却系统,并进一步研究了热流密度、蒸发压力、喷嘴进口压力对换热性能的影响。实验中在123 W/cm2的热流密度条件下,可保证热沉表面温度低于60℃;在喷嘴进口压力350 kPa,蒸发压力185 kPa的条件下换热系数可以达到25000 W/(m2.K),在热流密度130 W/cm2时,热沉表面温度标准差为2.5℃。结果表明,该系统能够获得较低的热沉表面温度、温度分布均匀并且具有较高的换热系数,能够满足高功率固体激光器对散热的需求。 In order to improve the heat dissipation performance of high power solid-state laser, an integrated refrigeration spray cooling system was designed by combining cooling system and spray cooling system with R600a as cooling medium. The effects of heat flux density, evaporation pressure, Effect of heat exchange performance. In the experiment, under the conditions of heat flux density of 123 W / cm2, the surface temperature of the heat sink can be guaranteed to be lower than 60 ℃. The heat transfer coefficient can reach 25000 W / (m2.K) under the nozzle pressure of 350 kPa and the pressure of 185 kPa ), The standard deviation of the surface temperature of the heat sink is 2.5 ℃ when the heat flux is 130 W / cm2. The results show that the system can obtain a lower heat sink surface temperature, uniform temperature distribution and high heat transfer coefficient to meet the high power solid state laser cooling requirements.