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本文采用双源电子束设备制备了一种新型的IPTO透明导电薄膜,通过开尔文探针法测试,其功函数为5.14e V。新型IPTO薄膜的可见光透过率及导电性与商业化的ITO薄膜可媲美。
In this paper, a new type of IPTO transparent conductive film was prepared by dual-electron electron beam apparatus and its work function was 5.14eV by Kelvin probe method. The new IPTO film has comparable visible light transmittance and conductivity to commercial ITO film.