近年来,由于传统的电互连技术暴露其固有的瓶颈问题,光互连技术成为研究的热点。而有机物光波导以其独有的优势,在光互连中占据了主要地位。聚硅氧烷光波导是最适合850 nm波段的有机物光波导之一。研究波导的过程中,一直存在着难题:如何实现波导的高精度无损测量。而电荷耦合器件(CCD)无损测量法具有操作简单等优势成为研究的热点。针对CCD测量法中存在的如何保证测量图像中光的传输方向,保持较高精度水平以及如何较高精度地确定CCD视场内的波导通光长度问题,提出了聚硅氧烷光波导损耗无损测量图像的消旋理论和方法,以及估计CCD视场内波导通光长度的理论和方法,并和传统的截断法结果进行了对比,验证了方法的正确性和有效性。 In recent years, the optical interconnection technology has become a research hotspot due to its inherent bottleneck exposed by the traditional electrical interconnect technology. The organic optical waveguide with its unique advantages in the optical interconnect occupy a major position. Silicone optical waveguide is one of the most suitable organic optical waveguides in the 850 nm band. In the course of studying the waveguide, there are always problems: how to realize the high-precision non-destructive measurement of the waveguide. The charge-coupled device (CCD) non-destructive measurement method has the advantages of simple operation and become the hot spot. Aiming at the problem of how to ensure the transmission direction of light in the measurement image and how to maintain a high level of accuracy in the CCD measurement method and how to determine the wave length of the waveguide in the CCD field of view with high accuracy, The theory and method of measuring the deconvolution of the image and the theory and method of estimating the length of the waveguide in the field of view of the CCD are compared with the results of the traditional truncation method to verify the correctness and effectiveness of the method.