论文部分内容阅读
本文研究了Kornelsen型离子枪的离子束束流,束流密度和最小束斑随源压强P,离子能量E的变化规律,并给出了斑点大小随离子能量、源压强变化的半经验公式:d=k(p)/E~1/2+f(p)。同时还给出了一种和离子枪口连成一体的能量分散量测装置,这种装置至少能测出0.36ev的能量分散。利用它测定了Kornelsen型离子枪的离子源,各级电透镜所形成的离子束的轴向能量分散和总能量分散。
In this paper, the variations of ion beam current, beam current density and minimum beam spot with the source pressure P and ion energy E of Kornelsen ion gun are studied. The semiempirical formula of the spot size with ion energy and source pressure is given. d = k (p) / E ~ 1/2 + f (p). At the same time, an energy dispersive measuring device integrated with the ion muzzle is also provided, which can measure at least 0.36 eV of energy dispersion. It was used to measure the ion source of Kornelsen type ion gun and the axial energy dispersion and total energy dispersion of the ion beam formed by the electric lenses of different levels.