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本文提出了压电薄膜微马达的工作原理，介绍了该马达的优良性能、结构形式和加工工艺，最后指出了该马达研制的关键技术以及应用前景。
In this paper, the working principle of the piezoelectric thin film micro-motor is presented. The excellent performance, structure and processing technology of the motor are introduced. Finally, the key technologies and application prospects of the motor are pointed out.