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多温区空间晶体生长炉温度系统是一个多变量强耦合对象。为实现炉温的精确控制,提出了一种基于遗传算法的多变量预测控制器,能消除系统耦合对控制的不良影响,提高控制品质。阶梯式控制策略的引入,减少了计算负担。仿真实验结果验证了该方法的有效性。
Multi-temperature space crystal growth furnace temperature system is a multi-variable strong coupling object. In order to achieve accurate control of furnace temperature, a multi-variable predictive controller based on genetic algorithm is proposed, which can eliminate the adverse effects of system coupling on control and improve the control quality. The introduction of ladder control strategy, reducing the computational burden. Simulation results verify the effectiveness of the proposed method.