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本文运用有效折射率法和WKB法对具有梯形状截面的硅脊形波导的模式特性作了分析,导出了TE模和TM模的模方程以及截止方程,并运用一阶微扰法对因波导顶部注入载流子而引起的模式调制的大小作了数值估计。其结果可为全硅光波导器件的研制提供指导。
In this paper, the mode characteristics of silicon ridge waveguide with trapezoidal cross-section were analyzed by effective refractive index method and WKB method. The mode equations and cut-off equations of TE mode and TM mode were deduced. The first- The size of the mode modulation caused by the carrier injection at the top is numerically evaluated. The results provide guidance for the development of all-silicon optical waveguide devices.