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微尺度线电极电解是近期出现的一种新加工方法,采用钨丝作为线电极,在加工过程中电极无损耗,通过控制工具电极轨迹可实现微细结构加工。建立了微尺度线电极电解加工模型;通过微尺度线电极叠加微幅振动,促进了加工间隙中电解液更新;针对加工电压、脉冲宽度、脉冲周期和加工速度等影响微尺度线电极电解加工精度的因素进行了参数对比试验,并对加工参数进行了分析和优化。采用电化学腐蚀原理进行微米尺度线电极的在线制作,在线制得直径10μm和2μm的线电极,实现了切缝宽度为20μm以下的复杂微细结构以及切缝宽度为8μm以下的微螺旋结构。
Micro-scale wire electrode electrolysis is a new processing method that appears recently. The tungsten wire is used as the wire electrode, and the electrode has no loss during processing. The micro-structure machining can be realized by controlling the electrode trace of the tool. The micro-scale wire electrode electrolysis processing model was established. Micro-amplitude wire electrode superimposed micro-vibration to promote the electrolyte renewal in the machining gap. According to the processing voltage, pulse width, pulse period and processing speed, The factors of comparative test parameters, and processing parameters were analyzed and optimized. Electrochemical etching principle was used to fabricate the micro-scale wire electrode. The wire electrodes with diameters of 10μm and 2μm were fabricated online. The micro-spiral structure with the slit width of 20μm or less and the micro-spiral structure with the slit width of 8μm were realized.