一、前言莫尔轮廓法的基本原理是用一块基准光栅和另一个被测面轮廓调制的影栅或象栅共同构成的莫尔图案来分析测量被测件的三维袭面轮廓。目前世界上已提出了两类不同布局的莫尔轮廓装置,一类叫照射型,即把基准光栅投射到物体表面上,观察(或照相)基准光栅和物体表面的阴影光栅形成的莫尔条纹。根据莫尔条纹的范围,量出两维尺寸,然后由公式算出图形的高度,于是可求出物体的三维形状;另一类是投影法,在一个方向把光栅投影到物体 I. Introduction The basic principle of the Morrow Contour Method is to analyze and measure the three-dimensional attack surface profile of a DUT by using a Moiré pattern composed of a reference grating and a shadow grid or an image grid that is contoured by another measured surface. Two types of moiré contours have been proposed in the world. One is the so-called irradiation type, in which a reference grating is projected onto the surface of an object and the moiré fringe formed by the shadow grating of the reference grating and the surface of the object is observed (or photographed) . According to the range of Moiré fringes, measure the two-dimensional size, and then calculate the height of the figure by the formula, so as to obtain the three-dimensional shape of the object; the other is the projection method, which projects the grating onto the object in one direction