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为了满足光学元件曲率半径精密检测的需求,设计了应用激光干涉方法的曲率半径精密检测系统,实现了对口径100~300 mm,曲率半径500~2 000 mm光学元件曲率半径的高精度,非接触式测量。并分析了影响曲率半径测量结果的各项不确定度,进行不确定度合成。最终完成曲率半径精密检测系统的装调,进行验证实验,曲率半径测量结果相对不确定度约7×10-6,满足了10×10-6的设计要求。
In order to meet the requirement of precise detection of the radius of curvature of the optical element, a precise detection system of the radius of curvature of the laser interferometer is designed. The precision of the radius of curvature of the optical element with the diameter of 100-300 mm and the radius of curvature of 500-2000 mm is achieved. Measurement. The uncertainties of the measurement results of the radius of curvature are analyzed and the uncertainty is synthesized. Finally, the installation of the precision detection system of the radius of curvature is completed and the verification experiment is carried out. The relative uncertainty of the measurement results of the radius of curvature is about 7 × 10-6, which meets the design requirement of 10 × 10-6.