【摘 要】
：
Ni films are deposited by using ultra high vacuum dc magnetron sputtering onto silicon substrates at room temperature, and the high-quality and high-density fil
【机 构】
：
Institute of Precision Optical Engineering, Tongji University, Shanghai 200092
论文部分内容阅读
Ni films are deposited by using ultra high vacuum dc magnetron sputtering onto silicon substrates at room temperature, and the high-quality and high-density films are prepared. The parameters, such as thickness, density and surface roughness, are obtained by using small-angle x-ray diffraction (XRD) analyses with the Marquardt gradient-expansion algorithm. The deposition rate is calculated and the Ni single layer can be fabricated precisely. Based on the fitting results, we can find that the surface roughness of the Ni films is about 0.7nm, the densities of Ni films are around 97% and the deposition rate is 0.26nm/s. The roughness of the surface is also characterized by using an atomic force microscope (AFM). The changing trend of the surface roughness in the simulation of XRD is in good agreement with the AFM measurement.
其他文献
The room-temperature second-, third- and fourth-order nonlinear dielectric constants of poled (1-x ) Pb(Mg1/3Nb2 / 3 )O3-xPbTiO3 single crystals were determined
Due to interaction with the vacuum of the radiation field, near-degenerate lower levels in a Λ system have an additional coherence term, the spontaneously gene
We have investigated the generation of highly-efficient blue light in critically type-I phase-matched LiBsO5(LBO) with intracavity frequency doubling of diode-p
在政府的大力支持下,近年来我国新疆地区各级教育均实现了较为长足的发展,但在笔者的实际调查中发现,汉语口语教学在这一发展中并没有出现根本性改变,这一教学以往存在的不足
In a self-consistent mean-field treatment of the two-dimensional t - t＇ - J model, we theoretically examine thecoupling of in-plane quasi-particles to the antife
The Bak-Sneppen evolution model is generalized in terms of a new concept and quantity: interaction strength.Based on a quantitative definition, the interaction
The upconversion fluorescence emission of Er3+ -doped 60GeO2-20PbO-20PbF2 glass was experimentally investigated under the pump of 976-nm laser diode. The result
In the framework of the tight binding model, the electronic transmission properties of two-dimensional Penrose lattices with free boundary conditions are studie
辽宁省是我国主要花生生产区之一,全省花生种植面积主要分布在辽南、辽西及辽西北地区,随着花生种植面积的不断扩大和复膜栽培技术的推广应用,当前生产上迫切需要丰产稳产、
864丛水稻花粉植株在未经人工加倍的情况下,多倍体占1.9—8.0％,二倍体占43.3—72.0％,单倍体占20.0—48.4％。在二倍体H_1代中,可育丛为73.2—74.4％,不育丛为26.8—25.6％,其中三系杂