实验研究中发现LiNbO3集成光波导电场传感器的输出波形中叠加有频率在几百千赫兹左右的振荡信号,导致传感器探测到的电场信号发生畸变。从LiNbO3衬底的压电效应出发对这一谐振现象进行了理论分析。比较谐振频率的理论计算值和实际测量值得知,LiNbO3衬底的宽度是影响谐振的主要因素。针对一种用于雷电电磁脉冲测量的LiNbO3集成光波导电场传感器,其设计衬底宽度为3mm,再次实验发现振荡信号被抑制在-30dB以下。 Experimental study found that LiNbO3 integrated optical waveguide electric field sensor output waveform superimposed on the frequency of hundreds of kilohertz oscillation signal, resulting in the sensor detects the electric field signal distortion. Based on the piezoelectric effect of LiNbO3 substrate, this resonance phenomenon is theoretically analyzed. Comparing the theoretical calculation value of resonance frequency with the actual measured value, it is found that the width of LiNbO3 substrate is the main factor affecting the resonance. For a LiNbO3 integrated optical waveguide electric field sensor for lightning electromagnetic pulse measurement, the designed substrate width is 3mm, and again experiments show that the oscillation signal is suppressed below -30dB.