论文部分内容阅读
研究了用同步辐射源标定软X光掠入射平面镜的反射率。实验采用北京同步辐射装置(BSRF)-3W1B束线及反射率计靶室,在50~1 500 eV能区,做了C,Si,Ni和Au材料平面镜在1°~7°掠射角下的反射率标定曲线。由于3W1B束线的单色器采用变间距光栅作色散元件,光栅分光必然存在高次谐波,高次谐波严重影响光源的单色性,从而给平面镜的反射率标定值带来误差。前置滤片虽然能有效抵制高次谐波,但不能完全消除高次谐波。为此,利用透射光栅对光源做了单色性研究,给出高次谐波在不同能区所占光源强度的比例,从而对平面镜反射率标定值做出修正。
The reflectivity of a soft X-ray grazing incidence mirror with a synchrotron radiation source was studied. In the experiment, the BSRF-3W1B beamline and the reflectometer target chamber were used to make plane mirrors of C, Si, Ni and Au in the range of 1 ° -7 ° at 50-1 500 eV Reflectance calibration curve. Because the monochromator of 3W1B beam line adopts the variable pitch grating as the dispersion element, the grating spectroscopy inevitably has higher harmonics, and the higher harmonics seriously affect the monochromaticity of the light source, thereby bringing error to the calibration value of the flat mirror. Although the pre-filter can effectively resist higher harmonics, but can not completely eliminate higher harmonics. For this reason, the monochromaticity of the light source is studied by using the transmission grating, and the ratio of the light intensity of the higher harmonics in different energy regions is given, so as to correct the calibration value of the plane mirror reflectivity.