Design of GGNMOS ESD protection device for radiation-hardened 0.18μm CMOS process

来源 :半导体学报(英文版) | 被引量 : 0次 | 上传用户:c472559561
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
In this paper,the ESD discharge capability of GGNMOS (gate grounded NMOS) device in the radiation-hardened 0.18μm bulk silicon CMOS process (Rad-Hard by Process:RHBP) is optimized by layout and ion implantation design.The effects of gate length,DCGS and ESD ion implantation of GGNMOS on discharge current density and lattice temperature are studied by TCAD and device simulation.The size of DCGS,multi finger number and single finger width of ESD verification structures are designed,and the discharge capacity and efficiency of GGNMOS devices in ESD are characterized by TLP test technology.Finally,the optimized GGNMOS is verified on the DSP circuit,and its ESD performance is over 3500 V in HBM mode.
其他文献
鉴于采煤机复杂工况下微弱故障特征难以提取的问题,应用最大相关峭度解卷积(Maximum Correlated Kurtosis Deconvolution,MCKD)方法于采煤机截割部齿轮箱的故障诊断.然而,凭
自然资源法治是生态文明建设的重要促进措施和制度保障,而它的实现离不开科学知识尤其是自然和社会科学理论和方法及其同法治理论的有机结合.自然资源法治的科学化是尊重自然
为了解决传统铸件履带笨重、缺陷多、废品率高的问题,并保证履带具有低接地比压以适应排岩场的持续沉降,以矿用排岩机履带为研究对象,采用拓扑优化设计方法,设计出一种高承载