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结合有效介质理论和薄膜光学的抗反射设计方法,设计了基于0.65μm工作波长的亚波长金属偏振分束光栅,给出了光栅的优化设计参数,采用严格耦合波理论分析了光栅的偏振分束特性.结果表明,亚波长金属光栅对TE偏振表现为金属膜特性,具有高反射,对TM偏振表现为介质膜特性,具有高透射,在-30°<θ<30°的大入射角范围和0.47μm<λ<0.80μm的宽入射波谱内,该光栅的透射光和反射光均具有高偏振消光比和低插入损耗的特点.
Based on the theory of effective medium and the anti-reflection design method of thin-film optics, a subwavelength metal polarization beam splitter based on working wavelength of 0.65μm was designed. The optimal design parameters of the grating were given. The grating’s polarization splitting The results show that the subwavelength metallic gratings exhibit the characteristics of metal film as TE polarization, high reflection, TM dielectric properties for the polarization, high transmittance, large incident angle range of -30 ° <θ <30 ° and 0.47μm <λ <0.80μm broad incident spectrum, the grating transmitted and reflected light with high polarization extinction ratio and low insertion loss characteristics.